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MEMS Mechanical Sensors

MEMS Mechanical Sensors

For a listing of recent titles in the Artech House
Microelectromechanical Systems (MEMS) Series, turn to the back of this book.

MEMS Mechanical Sensors
Stephen Beeby
Graham Ensell
Michael Kraft
Neil White

Artech House, Inc.
Boston • London
www.artechhouse.com

Library of Congress Cataloging-in-Publication Data
A catalog record for this book is available from the U.S. Library of Congress.

British Library Cataloguing in Publication Data
Beeby, Stephen.
MEMS mechanical sensors.— (Artech House MEMS library)
1. Microelectricalmechanical systems—Design and construction
I. Beeby, Stephen
621.3’81

2. Transducers

ISBN 1-58053-536-4

Cover design by Igor Valdman

© 2004 ARTECH HOUSE, INC.
685 Canton Street
Norwood, MA 02062
All rights reserved. Printed and bound in the United States of America. No part of this book
may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying, recording, or by any

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